Low-temperature embossing technique for fabrication of large-area polymeric microlens array with supercritical carbon dioxide

Jing-Tang WuYing-Ta ChuSen-Yeu YangChen-Chung LiSEN-YEU YANG2021-11-222021-11-222010http://iopscience.iop.org/0960-1317/20/7/075023https://scholars.lib.ntu.edu.tw/handle/123456789/587627Low-temperature embossing technique for fabrication of large-area polymeric microlens array with supercritical carbon dioxidejournal article