A miniature 2×2 mechanical optical switch with a thin MEMS mirror

Fan, K.C.K.C.FanLin, W.L.W.L.LinChiang, L.H.L.H.ChiangChen, S.H.S.H.ChenChung, T.T.T.T.ChungYang, Y.J.Y.J.Yang2011-02-112018-06-282011-02-112018-06-282009http://ntur.lib.ntu.edu.tw//handle/246246/222857en-USA miniature 2×2 mechanical optical switch with a thin MEMS mirrorjournal article