High-quality Thin Single-Crystal Y2O3 films Grown on Si (111)

Nieh, C-WC-WNiehLee, W-CW-CLeeYang, Z-KZ-KYangLee, Y-JY-JLeeCheng, PenPenChengLin, T-DT-DLinMINGHWEI HONGKwo, JJKwoHsu, C-HC-HHsu2018-09-102018-09-102006http://scholars.lib.ntu.edu.tw/handle/123456789/323233High-quality Thin Single-Crystal Y2O3 films Grown on Si (111)conference paper