Y. Y. LiY. W. LeeT. S. HoJ. H. WangI C. WuT. W. HsuY. T. ChenS. L. HuangSHENG-LUNG HUANG2019-10-312019-10-3120181469592https://scholars.lib.ntu.edu.tw/handle/123456789/429662Spectroscopic characterization of Si/Mo thin-film stack at extreme ultraviolet rangejournal article10.1364/ol.43.0040292-s2.0-85053662649