Fabrication of micro-optical switch by post-CMOS micromachining process

Cheng, Y.-C.Y.-C.ChengLee, C.-Y.C.-Y.LeeDai, C.-L.C.-L.DaiChen, W.-J.W.-J.ChenChang, P.-Z.P.-Z.ChangPING-HEI CHENPEI-ZEN CHANG2020-04-282020-04-282004https://scholars.lib.ntu.edu.tw/handle/123456789/486845Fabrication of micro-optical switch by post-CMOS micromachining processconference paper10.1117/12.5453072-s2.0-8844229674https://www.scopus.com/inward/record.uri?eid=2-s2.0-8844229674&doi=10.1117%2f12.545307&partnerID=40&md5=1313fa81b9a46f0bf75bf6a5949d53f6