Effects of Annealing Temperature and Nitrogen Content on Effective Work Function of Tungsten Nitride

Huang, C.-H.C.-H.HuangTsai, C.-E.C.-E.TsaiChen, Y.-R.Y.-R.ChenCHEE-WEE LIU2021-02-222021-02-222019https://www.scopus.com/inward/record.url?eid=2-s2.0-85069842098&partnerID=40&md5=e2b622d56d3bdf64b6041c5325cee628https://scholars.lib.ntu.edu.tw/handle/123456789/549179Effects of Annealing Temperature and Nitrogen Content on Effective Work Function of Tungsten Nitridejournal article10.1109/LED.2019.29222492-s2.0-85069842098