The Origin of Instability in Metal/SiO2/InSb MOS Capacitor Fabricated by Photo-Enhanced Chemical Vapor Deposition

Sun, Tai-PingTai-PingSunLee, Si-ChenSi-ChenLeeYang, Seng-JennSeng-JennYang2009-02-042018-07-062009-02-042018-07-061989-06http://ntur.lib.ntu.edu.tw//handle/246246/121654Orlando, FLThe Origin of Instability in Metal/SiO2/InSb MOS Capacitor Fabricated by Photo-Enhanced Chemical Vapor Depositionconference paper