An Intelligent 3D-AFM Scanning Process Based on Online Probe Rotation and Adaptive Speed Strategy

Chen, Huang-ChihHuang-ChihChenLee, Sheng-AnSheng-AnLeeChou, Ting-AnTing-AnChouFu, Li-ChenLi-ChenFu2025-06-162025-06-1620251536125Xhttps://www.scopus.com/record/display.uri?eid=2-s2.0-105004068490&origin=resultslisthttps://scholars.lib.ntu.edu.tw/handle/123456789/730032false[SDGs]SDG7An Intelligent 3D-AFM Scanning Process Based on Online Probe Rotation and Adaptive Speed Strategyjournal article10.1109/tnano.2025.35658472-s2.0-105004068490