Fabrication of Diffractive Optical Elements Using the CMOS Process

Dai, Ching-LiangChing-LiangDaiChen, Hung-LinHung-LinChenLee, Chi-YuanChi-YuanLeePEI-ZEN CHANG2009-01-212018-06-292009-01-212018-06-292002http://ntur.lib.ntu.edu.tw//handle/246246/106968application/pdf689049 bytesapplication/pdfen-USFabrication of Diffractive Optical Elements Using the CMOS Process10.1088/0960-1317/12/1/3042-s2.0-0036150571WOS:000173628400004http://ntur.lib.ntu.edu.tw/bitstream/246246/106968/1/04.pdf