臺灣大學: 工程科學及海洋工程學研究所吳文中鍾承恩Chung, Cheng-EnCheng-EnChung2013-03-272018-06-282013-03-272018-06-282011http://ntur.lib.ntu.edu.tw//handle/246246/252359本論文為使用微機電製程技術研製一能將環境機械振動能轉換為電能之靜電式微型能量擷取器，此擷取器由上下層結構所組成，並於上下層結構中維持一固定間隙。上層結構包含彈簧、質量塊及條狀收集電極，下層結構則有駐極體層及條狀地電極，其中下層結構之駐極體層經電暈放電後，能儲存靜電荷於材料表面，而當結構受外界振動源時，造成上下層條狀電極之重疊面積隨時間改變，並在上層結構之條狀電極上產生感應電荷，再外加一電阻，進而能將電能擷取出。此擷取器使用微機電製程技術研製而成，其中彈簧連接質量塊之結構設計使其能大幅降低結構共振頻並達到大撓度振動之成效。此外，由文獻及理論推導得知，駐極體的駐電性優劣嚴重影響其輸出功率，本論文亦對4種不同駐極體材料進行測試，經高壓電暈放電方法使駐極體層帶有負靜電後，進行靜電量測，實驗結果顯示Parylene C在經過六天電荷衰減後，其表面電荷密度較COC/S2C6、Teflon AF、Parylene N佳，可達3.26 mC/m2，而實驗量測結果得此能量擷取器在頻率為189.6 Hz、加速度為0.25 g、最佳阻抗為470 kΩ時，有最佳輸出功率達160.86 nW，而水平靜電式能量擷取之理論推導，亦展現在本論文研究中。In this work, a micro electret power harvester using electret film has been developed. The harvester is combined with top and the bottom parts. The top structure is composed of two side silicon springs and the middle proof mass with the collecting stripped electrode. The bottom structure is Parylene C electret with the ground stripped electrode on silicon substrate. By using the high aspect ratio spring structure of silicon, the harvester could vibrate at the relatively low frequency and have the large amplitude. As for the electret film, we use Parylene C electret because its surface charge density is 3.26 mC/m2 and it is higher than COC/S2C6, Teflon Af and Parylene N electret after six-day charge decay. With the present power harvester, 160.86 nW is obtained at 189.6 Hz, 0.25 g. The theory of the electret power harvester model with horizontal oscillation is also presented.5261229 bytesapplication/pdfen-US微機電能量擷取靜電駐極體電暈放電MEMSPower HarvestingElectrostaticsElectretCorona Dischargingthesishttp://ntur.lib.ntu.edu.tw/bitstream/246246/252359/1/ntu-100-R98525020-1.pdf