Pi-Chen LinJun-Yu LiHou-Jen ChenKaifan LinMIIN-JANG CHENKun-Ming LinHSIN-CHIH LIN2024-09-302024-09-302024-08-03https://www.scopus.com/record/display.uri?eid=2-s2.0-85202346034&origin=resultslisthttps://scholars.lib.ntu.edu.tw/handle/123456789/721614The purpose of this study is to investigate the indirect effects on the properties of ZrO2 films deposited by atomic layer deposition (ALD) when an Mg-Ca alloy is modified through equal-channel angular pressing (ECAP) following extrusion. The study aims to understand how the increase in CaO content in the native oxide layer of the Mg-Ca alloy influences the crystallinity and defect density of the ZrO2 film. Consequently, the corrosion protection performance of the ZrO2 film is enhanced by 1.2 to 1.5 times. A reduction in the anti-scratch property of the ZrO2 film was also observed, with a critical load reduction of 34 μN. This research provides a detailed analysis of the modifications induced by ECAP on the as-extruded Mg-Ca alloy and its subsequent impact on the properties of the ZrO2 film.trueatomic layer depositioncorrosion protectionequal-channel angular pressingindirect film improvementmagnesium–calcium alloyjournal article10.3390/mi150810062-s2.0-85202346034