Substitutional carbon reduction in SiGeC alloys grown by rapid thermal chemical vapor deposition

CHEE-WEE LIULiu, C.W.C.W.LiuTseng, Y.D.Y.D.TsengHuang, Y.S.Y.S.HuangCHEE-WEE LIU2018-09-102018-09-101999http://www.scopus.com/inward/record.url?eid=2-s2.0-0001652784&partnerID=MN8TOARShttp://scholars.lib.ntu.edu.tw/handle/123456789/350497Substitutional carbon reduction in SiGeC alloys grown by rapid thermal chemical vapor depositionjournal article