Yang, Yao-Joe JosephYao-Joe JosephYangChien, Chih-MingChih-MingChienKamon, MattanMattanKamonRabinovich, Vladimir L.Vladimir L.RabinovichGilbert, John R.John R.Gilbert2008-11-052018-06-282008-11-052018-06-282005http://ntur.lib.ntu.edu.tw//handle/246246/86003application/pdf2729300 bytesapplication/pdfen-USExtraction of Frequency Dependent Macromodels for Mems Squeezed-Film Damping Effectsjournal articlehttp://ntur.lib.ntu.edu.tw/bitstream/246246/86003/1/08.pdf