Ultrathin TiO<sub>2</sub> amorphous films for high transmittance APSM blanks at 157 and 193 nm wavelength simultaneously

F. D. Lai,F. D. LaiC. M. Chang,C. M. ChangL. A. Wang,L. A. WangT. S. Yih,T. S. YihLON A. WANG2018-09-102018-09-102003-11http://scholars.lib.ntu.edu.tw/handle/123456789/304318Ultrathin TiO<sub>2</sub> amorphous films for high transmittance APSM blanks at 157 and 193 nm wavelength simultaneouslyjournal article2-s2.0-0942278324