The Study on the Fluid Dynamics and Electromagnetics of Capacitive Micro Accelerometers(III), NSC-report, NSC-87-2218-E002-015

Chang, P.Z.P.Z.ChangWang, A.-B.A.-B.WangAN-BANG WANG2020-05-142020-05-141999https://scholars.lib.ntu.edu.tw/handle/123456789/492805The Study on the Fluid Dynamics and Electromagnetics of Capacitive Micro Accelerometers(III), NSC-report, NSC-87-2218-E002-015report