Fabrication of sub-quarter-micron grating patterns by employing DUV holographic lithography

Wang, L. A.L. A.WangLin, C. H.C. H.LinChen, J. H.J. H.Chen2009-03-252018-07-062009-03-252018-07-061999http://ntur.lib.ntu.edu.tw//handle/246246/148148application/pdf809290 bytesapplication/pdfen-USFabrication of sub-quarter-micron grating patterns by employing DUV holographic lithographyjournal articlehttp://ntur.lib.ntu.edu.tw/bitstream/246246/148148/1/15.pdf