Predictive formulae for OPC with applications to lithography-friendly routing

Chen, T.-C.T.-C.ChenLiao, G.-W.G.-W.LiaoYAO-WEN CHANG2018-09-102018-09-102008http://www.scopus.com/inward/record.url?eid=2-s2.0-51549102456&partnerID=MN8TOARShttp://scholars.lib.ntu.edu.tw/handle/123456789/341023Predictive formulae for OPC with applications to lithography-friendly routingconference paper10.1109/DAC.2008.45558702-s2.0-51549102456