Design of automatic controllers for model-based OPC with optimal resist threshold determination for improving correction convergence

Su, Yi-ShengYi-ShengSuNg, Philip C. W.Philip C. W.NgTsai, Kuen-YuKuen-YuTsaiChen, Yung-YawYung-YawChen2009-02-182018-07-062009-02-182018-07-062008http://ntur.lib.ntu.edu.tw//handle/246246/132901application/pdf669825 bytesapplication/pdfen-USDesign of automatic controllers for model-based OPC with optimal resist threshold determination for improving correction convergencejournal article2-s2.0-45449107191http://ntur.lib.ntu.edu.tw/bitstream/246246/132901/1/28.pdf