Thermal-flow techniques for sub-35 nm contact-hole fabrication in electron-beam lithography

Chen, H.L.H.L.ChenChen, C.H.C.H.ChenKo, F.H.F.H.KoChu, T.C.T.C.ChuPan, C.T.C.T.PanLin, H.C.H.C.LinHSUEN-LI CHEN2020-05-122020-05-122002https://scholars.lib.ntu.edu.tw/handle/123456789/491378Thermal-flow techniques for sub-35 nm contact-hole fabrication in electron-beam lithographyjournal article10.1116/1.15263522-s2.0-0036874413https://www.scopus.com/inward/record.uri?eid=2-s2.0-0036874413&doi=10.1116%2f1.1526352&partnerID=40&md5=ca563d9f4680d5a274dd1f3adc8cd78c