Deep ultraviolet enhanced wet chemical etching of gallium nitride

LUNG-HAN PENGChuang, C.-W.C.-W.ChuangHo, J.-K.J.-K.HoHuang, C.-N.C.-N.HuangChen, C.-Y.C.-Y.Chen2020-06-112020-06-111998https://scholars.lib.ntu.edu.tw/handle/123456789/499549Deep ultraviolet enhanced wet chemical etching of gallium nitridejournal article10.1063/1.1208792-s2.0-0000733746https://www.scopus.com/inward/record.uri?eid=2-s2.0-0000733746&doi=10.1063%2f1.120879&partnerID=40&md5=ebf60db02a522d6d78b297d3dbbfd876