The stresses and photoelastic effects in GaAs-GaAlAs multilayer wafers with masked and selective thermal oxidation structure

Liu, H.D.H.D.LiuFeng &amp, Z.C .Z.C .Feng &ampGuo, Z.Z.Z.Z.Guo2010-09-022018-07-052010-09-022018-07-051984-01http://ntur.lib.ntu.edu.tw//handle/246246/193701en-USThe stresses and photoelastic effects in GaAs-GaAlAs multilayer wafers with masked and selective thermal oxidation structurejournal article