Chang, P. Z.P. Z.ChangDai, C. L.C. L.DaiLu, S. S.S. S.Lu2009-05-152018-06-282009-05-152018-06-281997-11http://ntur.lib.ntu.edu.tw//handle/246246/156614en-USMicrostructures for Measuring Residual Strains of CMOS Thin Filmconference paper