Layout decomposition for Spacer-is-Metal (SIM) self-aligned double patterning

Fang, S.-Y.S.-Y.FangTai, Y.-S.Y.-S.TaiYAO-WEN CHANG2018-09-102018-09-102015http://www.scopus.com/inward/record.url?eid=2-s2.0-84926435602&partnerID=MN8TOARShttp://scholars.lib.ntu.edu.tw/handle/123456789/393137Layout decomposition for Spacer-is-Metal (SIM) self-aligned double patterningconference paper10.1109/ASPDAC.2015.70590852-s2.0-84926435602