Comparison of microstructures and magnetic properties in FePt alloy films deposited by direct current magnetron sputtering and high power impulse magnetron sputtering

Yang, W.-S.W.-S.YangSun, T.-H.T.-H.SunChen, S.-C.S.-C.ChenJen, S.-U.S.-U.JenGuo, H.-J.H.-J.GuoLiao, M.-H.M.-H.LiaoChen, J.-R.J.-R.ChenMING-HAN LIAO2020-01-132020-01-132019https://scholars.lib.ntu.edu.tw/handle/123456789/447939Comparison of microstructures and magnetic properties in FePt alloy films deposited by direct current magnetron sputtering and high power impulse magnetron sputteringjournal article10.1016/j.jallcom.2019.06.2162-s2.0-85067876208https://www.scopus.com/inward/record.uri?eid=2-s2.0-85067876208&doi=10.1016%2fj.jallcom.2019.06.216&partnerID=40&md5=b2bb7c08bcaf59617405d223e4bfd462