Out-of-plane vertical torsion mirror for optical scanner and chopper applications

Su, G.D.G.D.SuLee, S.S.S.S.LeeWu, M.C.M.C.WuGUO-DUNG JOHN SU2018-09-102018-09-101998http://www.scopus.com/inward/record.url?eid=2-s2.0-0031627611&partnerID=MN8TOARShttp://scholars.lib.ntu.edu.tw/handle/123456789/340734Out-of-plane vertical torsion mirror for optical scanner and chopper applicationsconference paper