Thickness-dependent stress effect in p-type metal-oxide-semiconductor structure investigated by substrate injection current

JENN-GWO HWU2018-09-102018-09-102003http://www.scopus.com/inward/record.url?eid=2-s2.0-0038307299&partnerID=MN8TOARShttp://scholars.lib.ntu.edu.tw/handle/123456789/301812Thickness-dependent stress effect in p-type metal-oxide-semiconductor structure investigated by substrate injection currentjournal article10.1063/1.1581004