Ultrathin gate oxides prepared by tensile-stress oxidation in tilted cathode anodization system

Wang, C.-C.C.-C.WangLi, T.-H.T.-H.LiChuang, K.-C.K.-C.ChuangHwu, J.-G.J.-G.HwuJENN-GWO HWU2018-09-102018-09-102008http://www.scopus.com/inward/record.url?eid=2-s2.0-38349127993&partnerID=MN8TOARShttp://scholars.lib.ntu.edu.tw/handle/123456789/338626Ultrathin gate oxides prepared by tensile-stress oxidation in tilted cathode anodization systemjournal article10.1149/1.2823494