2024-6-12025-04-14https://scholars.lib.ntu.edu.tw/handle/123456789/726448Precision MetrologyAutomated Optical Inspection (AOI)Wafer InspectionAdvanced Semiconductor Manufacturing ProcessesIntelligent InspectionVirtual Measurement (VM).精密量測自動化光學檢測晶圓檢測半導體先進製程智能化檢測虛擬量測半導體先進封裝製程之線上智能化AOI關鍵檢測技術與虛實整合系統研發-半導體先進封裝製程之線上智能化AOI關鍵檢測技術與虛實整合系統研發(4/4)