Analysis and design of flow field for precursor feeding in a PECVD system

Tsai, H.W.H.W.TsaiYang, K.H.K.H.YangPan, K.L.K.L.PanKUO-LONG PAN2020-01-132020-01-132015https://scholars.lib.ntu.edu.tw/handle/123456789/447794[SDGs]SDG6Analysis and design of flow field for precursor feeding in a PECVD systemconference paper10.6567/IFToMM.14TH.WC.PS3.0032-s2.0-85018969472https://www.scopus.com/inward/record.uri?eid=2-s2.0-85018969472&doi=10.6567%2fIFToMM.14TH.WC.PS3.003&partnerID=40&md5=1f81191e841890b4c931b093968f4757