Vibration control of an electron beam projection lithography system employing disturbance response decoupling techniques

Wang, Fu-ChengFu-ChengWangTsao, Yo-ChiaYo-ChiaTsaoYen, Jia-YushJia-YushYen2013-02-062018-06-282013-02-062018-06-282008http://ntur.lib.ntu.edu.tw//handle/246246/246682en-USVibration control of an electron beam projection lithography system employing disturbance response decoupling techniquesconference paper