Ting, Chih-YuanChih-YuanTingSheu, Hwo-ShuennHwo-ShuennSheuWu, Wen-FaWen-FaWuWana, Ben-ZuBen-ZuWana2008-12-172018-06-282008-12-172018-06-282007http://ntur.lib.ntu.edu.tw//handle/246246/92244application/pdf103921 bytesapplication/pdfen-USPorosity Effects on Properties of Mesoporous Silica Low-k Films Prepared Using Tetraethylorthosilicate with Different Templatesjournal articlehttp://ntur.lib.ntu.edu.tw/bitstream/246246/92244/1/39.pdf