Chen, A.A.ChenGuo, R.-S.R.-S.GuoLin, P.P.Lin2019-05-132019-05-132000https://www.scopus.com/inward/record.uri?eid=2-s2.0-0034583827&partnerID=40&md5=adfc4569c8e2a8144078ddd00e753e28https://scholars.lib.ntu.edu.tw/handle/123456789/407845Statistical analysis and design of semiconductor manufacturing systemsconference paper2-s2.0-0034583827