Development of a Six-degree-of-freedom Measurement System for the Accuracy of X-Y Stages

范光照Chen, M.J.M.J.ChenFan, K. C.K. C.Fan2009-05-152018-06-282009-05-152018-06-281997-11http://ntur.lib.ntu.edu.tw//handle/246246/156526en-USDevelopment of a Six-degree-of-freedom Measurement System for the Accuracy of X-Y Stagesconference paper