An investigation of unbalanced-magnetron sputtered TiAlN films on SKH51 high-speed steel

Wu, S.K.S.K.WuLin, H.C.H.C.LinLiu, P.L.P.L.LiuSHYI-KAAN WU2018-09-102018-09-102000http://www.scopus.com/inward/record.url?eid=2-s2.0-0034696062&partnerID=MN8TOARShttp://scholars.lib.ntu.edu.tw/handle/123456789/288874An investigation of unbalanced-magnetron sputtered TiAlN films on SKH51 high-speed steeljournal article