High-quality and highly-transparent AlN template on annealed sputter-deposited AlN buffer layer for deep ultra-violet light-emitting diodes

Huang, C.-Y.C.-Y.HuangWu, P.-Y.P.-Y.WuChang, K.-S.K.-S.ChangLin, Y.-H.Y.-H.LinPeng, W.-C.W.-C.PengChang, Y.-Y.Y.-Y.ChangLi, J.-P.J.-P.LiYen, H.-W.H.-W.YenWu, Y.S.Y.S.WuMiyake, H.H.MiyakeKuo, H.-C.H.-C.KuoHUNG-WEI YEN2020-05-122020-05-122017https://scholars.lib.ntu.edu.tw/handle/123456789/491435High-quality and highly-transparent AlN template on annealed sputter-deposited AlN buffer layer for deep ultra-violet light-emitting diodesjournal article10.1063/1.49837082-s2.0-85019178319https://www.scopus.com/inward/record.uri?eid=2-s2.0-85019178319&doi=10.1063%2f1.4983708&partnerID=40&md5=e336a089bac09685e3f465c02984dc57