Simulation program for the sensitivity and linearity of piezoresistive pressure sensors

YEN-WEN LU2018-09-102018-09-101999http://www.scopus.com/inward/record.url?eid=2-s2.0-0033342946&partnerID=MN8TOARShttp://scholars.lib.ntu.edu.tw/handle/123456789/346998Simulation program for the sensitivity and linearity of piezoresistive pressure sensorsjournal article10.1109/84.809067