Ting, Chih-YuanChih-YuanTingSheu, Hwo-ShuennHwo-ShuennSheuWan, Ben-ZuBen-ZuWan2008-12-172018-06-282008-12-172018-06-282005http://ntur.lib.ntu.edu.tw//handle/246246/92235en-USPorosity analysis of spin-on mesoporous silica filmsjournal article