Structural, optical and electrical characteristics of silicon carbon nitride

CHEE-WEE LIUChen, L.C.L.C.ChenWu, C.T.C.T.WuWen, C.-Y.C.-Y.WenWu, J.-J.J.-J.WuLiu, W.T.W.T.LiuCHEE-WEE LIU2018-09-102018-09-102000http://www.scopus.com/inward/record.url?eid=2-s2.0-0034505573&partnerID=MN8TOARShttp://scholars.lib.ntu.edu.tw/handle/123456789/289984Structural, optical and electrical characteristics of silicon carbon nitrideconference paper