Deposition of Ru and RuO2 thin films employing dicarbonyl bis-diketonate ruthenium complexes as CVD source reagents

Lai, Ying-HuiYing-HuiLaiChen, Yao-LunYao-LunChenChi, YunYunChiLiu, Chao-ShiuanChao-ShiuanLiuCarty, Arthur J.Arthur J.CartySHIE-MING PENGLee, Gene-HsiangGene-HsiangLee2018-09-102018-09-102003http://www.scopus.com/inward/record.url?eid=2-s2.0-0041565413&partnerID=MN8TOARShttp://scholars.lib.ntu.edu.tw/handle/123456789/302355application/pdf337660 bytesapplication/pdf[SDGs]SDG6Deposition of Ru and RuO2 thin films employing dicarbonyl bis-diketonate ruthenium complexes as CVD source reagentsjournal article10.1039/b300517h2-s2.0-0041565413WOS:000184308500026