Computational study of variations in gap size for the electrostatic levitating force of MEM device using Dual BEM

S.W. ChyuanY.S. LiaoJ.T ChenYUNN-SHIUAN LIAO2021-12-062021-12-062004https://scholars.lib.ntu.edu.tw/handle/123456789/589592Computational study of variations in gap size for the electrostatic levitating force of MEM device using Dual BEMjournal article