Simulation and fabrication results of electron optical systems for massively parallel maskless lithography

Hoi-Tou NgChien-Chieh HuangHsing-Hong ChenShin-Chuan ChenKen-Hsien HsiehKuen-Yu Tsai*JIA-HAN LI2022-01-032022-01-032008https://scholars.lib.ntu.edu.tw/handle/123456789/590912Simulation and fabrication results of electron optical systems for massively parallel maskless lithographyconference paper