A novel layout decomposition algorithm for triple patterning lithography

Fang, S.-Y.S.-Y.FangChang, Y.-W.Y.-W.ChangYAO-WEN CHANG2018-09-102018-09-102014http://www.scopus.com/inward/record.url?eid=2-s2.0-84897655385&partnerID=MN8TOARShttp://scholars.lib.ntu.edu.tw/handle/123456789/387332A novel layout decomposition algorithm for triple patterning lithographyjournal article10.1109/TCAD.2013.22886782-s2.0-84897655385WOS:000331974600006