Key Effects and Process Parameters Extraction on the CD of Reactive Ion Etching (RIE) Based on DOE Modeling

Rizquez, M.M.RizquezRoussy, A.A.RoussyBlue, J.J.BlueBucelle, L.L.BucellePinaton, J.J.PinatonPasquet, J.J.PasquetJAKEY BLUE2020-03-022020-03-022017https://scholars.lib.ntu.edu.tw/handle/123456789/467301Key Effects and Process Parameters Extraction on the CD of Reactive Ion Etching (RIE) Based on DOE Modelingjournal article10.1109/TSM.2017.27580202-s2.0-85030783822https://www.scopus.com/inward/record.uri?eid=2-s2.0-85030783822&doi=10.1109%2fTSM.2017.2758020&partnerID=40&md5=9450d07c12218840bc152298e17da060