Photoconductivity and highly selective ultraviolet sensing features of amorphous silicon carbon nitride thin films

Chen, C.-W.C.-W.ChenHuang, C.-C.C.-C.HuangLin, Y.-Y.Y.-Y.LinSu, W.-F.W.-F.SuChen, L.-C.L.-C.ChenChen, K.-H.K.-H.ChenWEI-FANG SUCHUN-WEI CHENLI-CHYONG CHEN2018-09-102018-09-10200600036951http://www.scopus.com/inward/record.url?eid=2-s2.0-32944463013&partnerID=MN8TOARShttp://scholars.lib.ntu.edu.tw/handle/123456789/326885application/pdfapplication/pdfPhotoconductivity and highly selective ultraviolet sensing features of amorphous silicon carbon nitride thin filmsjournal article10.1063/1.2178406