Young, H.-T.H.-T.YoungLin, W.Y.W.Y.LinHONG-TSU YOUNG2018-09-102018-09-102008http://www.scopus.com/inward/record.url?eid=2-s2.0-38849197830&partnerID=MN8TOARShttp://scholars.lib.ntu.edu.tw/handle/123456789/3392723D micro-scale profile measuring systembook