彭隆瀚臺灣大學：光電工程學研究所張家瑋Chang, Chia-WeiChia-WeiChang2007-11-252018-07-052007-11-252018-07-052004http://ntur.lib.ntu.edu.tw//handle/246246/50884本論文主要內容可分為三部分：第一部分為分佈式布拉格反射鏡(Distributed Bragg Reflector, DBR)的原理、數值模擬及結構設計；第二部分為利用光致化學氧化法在氮化鎵及其相關化合物材料(氮化鋁鎵、氮化銦鎵)上製作出分佈式布拉格反射鏡結構及雷射二極體元件；第三部分為元件光學特性量測。 吾人藉由光激發光( Photoluminescence, PL)的量測方式，量測元件的側向及表面發光光譜。吾人發現製作完DBR結構後的樣品，在側向收光的PL光譜中會多出許多尖峰產生，吾人推測這是DBR結構造成的共振效果；此外，由表面收光的PL光譜結果，發現製作DBR結構的元件其PL峰值強度的增加速率提升為Fabry-Perot樣品的兩倍。This thesis is distributed into three parts. The first part is about the theory, numerical simulation and structural design of Distributed Bragg Reflector (DBR).The second part is the fabrication of DBR structure and laser diode device on GaN based materials by using Photo Enhanced Chemically (PEC) oxidation method. The third part is the optical measurement and discussion of optical characteristics on our devices. We measure photoluminescence (PL) spectrum from two directions : one is from sample edge, and the other is from the normal to the sample surface. We find that there exist several peaks in the edge emission PL spectrum for the device with DBR structure. Besides, we find that the increasing rate of peak intensity is twice than those without DBR structure ( Fabry-Perot case) from the PL spectrum for the emitted light collected from the normal to the sample surface.第一章 緒論..................................1 1-1簡介.......................................1 1-2半導體雷射基本工作原理.....................3 1-3論文內容概述...............................8 第二章 側向分佈式布拉格反射鏡原理及理論模擬..9 2-1 DBR原理...................................9 2-2數值模擬..................................12 2-3反射率光譜模擬............................15 第三章 分佈式布拉格反射鏡及雷射二極體之製作.19 3-1光致化學氧化法原理........................19 3-2氮化鎵光致化學氧化法實驗架設..............22 3-2-1 實驗架設...............................22 3-2-2 溶液pH值與成長速率校準.................23 3-3分佈式布拉格反射鏡之製作..................27 3-4雷射二極體結構及元件製作..................29 3-4-1樣品結構................................29 3-4-2元件結構與製作流程......................32 3-4-3製作結果................................37 3-4-3-1樣品MQW1製作結果......................37 3-4-3-2樣品LD460製作結果.....................40 3-4-3-3樣品LD410製作結果.....................42 第四章 光學量測結果及分析...................46 4-1光學量測系統..............................46 4-1-1微光激發光量測系統架設..................46 4-1-2表面光激發光量測系統架設................48 4-2光譜分析..................................50 4-2-1邊緣放光(edge emission)光譜.............50 4-2-1-1樣品MQW1光譜分析......................50 4-2-1-2樣品LD460光譜分析.....................53 4-2-1-3樣品LD410光譜分析.....................57 4-2-2表面放光(surface emission)光譜..........60 4-2-2-1 Fabry-Perot樣品光譜分析..............60 4-2-2-2 DBR樣品光譜分析......................62 4-2-2-3 Fabry-Perot樣品與DBR樣品比較.........64 4-3 DBR反射率量測與計算方法..................65 第五章 結論與未來展望.......................67 參考資料.....................................69924163 bytesapplication/pdfen-US雷射二極體分佈式布拉格反射鏡Distributed Bragg ReflectorLaser Diodethesishttp://ntur.lib.ntu.edu.tw/bitstream/246246/50884/1/ntu-93-R91941001-1.pdf