Huang, Che-WeiChe-WeiHuangHuang, Yu-JieYu-JieHuangLin, Tsung-HsienTsung-HsienLinLin, Chih-TingChih-TingLinLee, Jen-KuangJen-KuangLeeChen, Li-GuangLi-GuangChenHsiao, Po-YunPo-YunHsiaoWu, Bi-RuBi-RuWuHsueh, Hsiao-TingHsiao-TingHsuehKuo, Bing-JyeBing-JyeKuoTsai, Hann-HueiHann-HueiTsaiLiao, Hsin-HaoHsin-HaoLiaoJuang, Ying-ZongYing-ZongJuangLu, Shey-ShiShey-ShiLu2013-01-292018-07-102013-01-292018-07-102011http://www.scopus.com/inward/record.url?eid=2-s2.0-84883762427&partnerID=MN8TOARShttp://scholars.lib.ntu.edu.tw/handle/123456789/365179http://ntur.lib.ntu.edu.tw/bitstream/246246/246097/-1/08.pdfSeattle, WA, USAAn integrated DNA detection system-on-chip (SoC), which includes microcantilever based DNA sensors, readout circuits, MCU, and RF OOK TX/RX, is implemented by a 0.35μm CMOS Bio-MEMS process and post-processing steps. For DNA sensing, the DNA immobilization process is used to make the probe DNA attaches on the surface of microcantilever via sulfur-gold covalent bond. Then the biosensor is proved to be sensitive to surface stress change induced by DNA hybridization on the surface of the microcantilever. The experiment results reveal the developed DNA detection SoC has excellent selectivity and detection concentration range of the specific DNA from 1pM to 10nM. Copyright ? (2011) by the Chemical and Biological Microsystems Society.[SDGs]SDG3Concentration ranges; DNA hybridization; DNA immobilization; Hepatitis B virus; Micro-cantilevers; Post processing; Read-out circuit; SoC; Application specific integrated circuits; Composite micromechanics; Programmable logic controllers; Viruses; DNAconference paper2-s2.0-84883762427http://ntur.lib.ntu.edu.tw/bitstream/246246/246097/-1/08.pdf