A linnik scanning white-light interferometry system using a MEMS digital-to-analog converter

Liao, H.-H.H.-H.LiaoYang, Y.-J.Y.-J.YangYAO-JOE YANG2020-01-132020-01-132010https://scholars.lib.ntu.edu.tw/handle/123456789/448525[SDGs]SDG7A linnik scanning white-light interferometry system using a MEMS digital-to-analog converterconference paper10.1016/j.proeng.2010.09.2192-s2.0-78650586212https://www.scopus.com/inward/record.uri?eid=2-s2.0-78650586212&doi=10.1016%2fj.proeng.2010.09.219&partnerID=40&md5=f8f1e287b3aea1b1866c4c62f49f2810