Sun, W.C.W.C.SunChang, W.L.W.L.ChangChen, C.H.C.H.ChenDu, C.H.C.H.DuWang, T.Y.T.Y.WangWang, T.T.WangCHUNG-WEN LAN2020-01-062020-01-062009https://scholars.lib.ntu.edu.tw/handle/123456789/444895The effects of passivation on monocrystalline silicon solar cells were investigated. Al2 O3 and SiO2 films, prepared by atomic layer deposition and thermal oxidation, respectively, were used as passivation layers. Passivation using a monolayer (SiO2) yielded a cell efficiency of 17.5%. However, the Al2 O3 / SiO 2 bilayer structure drastically increased cell efficiency to 20.1%. Quantum efficiency results revealed a significant improvement in the IR range, suggesting that bilayer passivation was effective on the back of a solar cell in providing a high energy conversion efficiency. © 2009 The Electrochemical Society.[SDGs]SDG7Bi-layer; Bi-layer structure; Cell efficiency; High efficiency; High energy; Monocrystalline silicon solar cells; Passivation layer; Passivation structure; Thermal oxidation; Cell membranes; Conversion efficiency; Energy conversion; Monolayers; Photovoltaic cells; Silicon compounds; Silicon oxides; Silicon solar cells; Solar cells; Solar energy; Passivationjournal article10.1149/1.31942522-s2.0-68949160685https://www.scopus.com/inward/record.uri?eid=2-s2.0-68949160685&doi=10.1149%2f1.3194252&partnerID=40&md5=9dafac96fe882c0727e8b3616df1b652