Applied electrostatic parallelogram actuators for microwave switches using the standard CMOS process

Dai, C.-L.C.-L.DaiYen, K.K.YenPEI-ZEN CHANG2020-04-282020-04-282001https://scholars.lib.ntu.edu.tw/handle/123456789/486855Applied electrostatic parallelogram actuators for microwave switches using the standard CMOS processjournal article10.1088/0960-1317/11/6/3112-s2.0-0035505876https://www.scopus.com/inward/record.uri?eid=2-s2.0-0035505876&doi=10.1088%2f0960-1317%2f11%2f6%2f311&partnerID=40&md5=4b73ebdc21d2d6a6b503f1af2c938f9e